A SHOWERHEAD HAVING A BLOCK FOR GAS FOLW CONTROL

摘要

A shower head is provided to control a gas flow by using a flow control block interposed between an upper diffusion block and a lower diffusion block, thereby improving the uniformity of the gas jet. An upper diffusion block(70) has a first distribution channel(71) and a second distribution channel(72). An middle diffusion block(80) is closely coupled to a lower portion of the upper diffusion block to form a first diffusion space(81), in which a first gas supplied through the first distribution channel is diffused. The middle diffusion block has a flow control block groove(86), plural first jet holes(83), a second distribution hall(85) and plural lower protrusions penetrating the first jet halls. A lower diffusion block(90) is closely coupled to the lower portion of the middle diffusion block. The lower diffusion block has plural second jet holes(93) and plural first through-holes(94). A flow control block(87) is positioned in the flow control block groove, and has a second supply hole(82) communicating with the second distribution hole.