发明名称 MACHINING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a machining apparatus capable of surely and stably performing a feeding operation of machining means by enabling a load detection of the machining means without depending on a load current value or a load sensor. <P>SOLUTION: The gap amount in the thrust direction or the radial direction of an air-bearing spindle which varies according to the feeding action of a working unit 30 is recognized by the variation of an air pressure generated in the gap, and the feeding action of the working unit 30 is safely controlled. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008049445(A) 申请公布日期 2008.03.06
申请号 JP20060228991 申请日期 2006.08.25
申请人 DISCO ABRASIVE SYST LTD 发明人 KUWANA KAZUTAKA;WATANABE HIROYUKI
分类号 B24B49/16;B24B37/005;B24B47/14;B24B49/08;F16C32/06;H01L21/304 主分类号 B24B49/16
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