| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of cracks around through-holes in a ceramic heater formed in a cylindrical shape. SOLUTION: The ceramic heater 100 has a first ceramic layer 110, and a second ceramic layer 120 wound around a core material 101. A pair of electrode pads 121a, 121b are formed on an outer surface (a first face) 120a of the second ceramic layer 120, and an exothermic part 142 and lead parts 143a, 143b are formed on an inner surface (a second face) 120b. The electrode pads 121a, 121b are connected with the lead parts 143a, 143b through via conductors 145a to 145d, respectively. Through-holes 144a to 144d in which the via conductors 145a to 145d are filled are formed through a punching process from the first face 120a toward the second face 120b, diameters enlarge from the first face 120a to the second face 120b. COPYRIGHT: (C)2008,JPO&INPIT
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