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发明名称
摘要
申请公布号
JP4056680(B2)
申请公布日期
2008.03.05
申请号
JP20000169314
申请日期
2000.06.06
申请人
发明人
分类号
C23C14/32;H01L21/28;H01L21/285
主分类号
C23C14/32
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