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发明名称
具有独立电容式及环形电浆源之电浆反应器装置
摘要
本发明揭示一种用于处理工件的电浆反应器,其包括一构成反应器腔室的室壁以及位在该腔室内的一工件支架、一环形电浆源、一RF功率施加器以及一RF功率产生器;其中该室壁包括一面向工件支架的顶部;该环形电浆源包括一中空凹角管道,该中空凹角管道位在腔室外部并具有一对端部连接至腔室内部并且形成一延伸通过该管道且横越工件支架直径的闭合环形路径;该RF功率施加器邻近一部分的凹角外部管道;以及该RF功率产生器耦合至环形电浆源的RF功率施加器。该反应器更包括一电容耦合电浆源功率施加器与一电浆偏压功率施加器,并且该电容耦合电浆源功率施加器具有一位在a)顶部与b)工件支架其中一处的源功率电极和一耦接至该电容耦合源功率施加器的VHF功率产生器,以及该电浆偏压功率施加器包含一位在该工件支架中的偏压功率电极和至少一耦接至该电浆偏压功率施加器的第一RF偏压功率产生器。
申请公布号
TW200811313
申请公布日期
2008.03.01
申请号
TW096114480
申请日期
2007.04.24
申请人
应用材料股份有限公司
发明人
彼得森亚历桑德M. PATERSON, ALEXANDER M.;托多罗瓦伦汀N. TODOROW, VALENTIN N.;帕纳葛波洛斯索多洛斯;海契布莱恩K. HATCHER, BRIAN K.;卡兹丹;韩蒙得爱德华P. 五世;荷伦约翰P. HOLLAND, JOHN P.;玛佑西金亚力山大
分类号
C23F1/00(2006.01);C23C16/00(2006.01)
主分类号
C23F1/00(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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