MICRO TORQUE AND MICRO STIFFNESS MEASUREMENT DEVICE

摘要

A micro torque and micro stiffness measurement device is provided to measure stiffness and torque of the HGA(head gimbal assembly) within a range less than 1 micro-newton meter by adjusting force converters and placing the force converters around the rotary center of a rotary stage. A head gimbal assembly is placed to contact with force converters mounted on a rotary stage(410). The force converters are adjusted to place the force converters around the rotary center of the rotary stage(420). The rotary stage is rotated(430). The torque and the torque change are measured by the head gimbal assembly on the force converter during the rotation(440). The force converters include two force converters horizontal to an x-shaft with a convertible gap between the force converters.