发明名称 Switching device for a pixel electrode and methods for fabricating the same
摘要 The invention discloses a switching device for a pixel electrode of display device and methods for fabricating the same. A gate is formed on a substrate. A gate insulating layer is formed on the gate. A buffer layer is formed between the gate and the substrate, and/or formed between the gate and the gate insulating layer. The buffer layer comprises TaSi<SUB>x</SUB>, TaSi<SUB>x</SUB>N<SUB>y</SUB>, TiSi<SUB>x</SUB>, TiSi<SUB>x</SUB>N<SUB>y</SUB>, WSi<SUB>x</SUB>, WSi<SUB>x</SUB>N<SUB>y</SUB>, or WC<SUB>x</SUB>N<SUB>y</SUB>. A semiconductor layer is formed on the gate insulating layer. A source and a drain are formed on a portion of the semiconductor layer. The gate is covered by the buffer layer.
申请公布号 US7332383(B2) 申请公布日期 2008.02.19
申请号 US20050247345 申请日期 2005.10.11
申请人 AU OPTRONICS CORP. 发明人 FANG KUO-LUNG;TSAI WEN-CHING;TU KUO-YUAN;LIN HAN-TU
分类号 H01L21/00;H01L21/4763;H01L21/84 主分类号 H01L21/00
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