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发明名称
孔径变化装置及其方法
摘要
本发明提供一种用于将孔径自不位于所要平面中之储存位置旋转至位于所要平面中之“使用”位置的装置。所述孔径之储存位置不干扰光学系统之辐射光束路径。所述装置可紧密地储存多个孔径且可在不需自所要平面移除较大孔径之情况下在所要平面中定位较小孔径。
申请公布号
TW200809833
申请公布日期
2008.02.16
申请号
TW096105246
申请日期
2007.02.13
申请人
尼康股份有限公司
发明人
菲利普斯;瓦特森
分类号
G11B7/135(2006.01)
主分类号
G11B7/135(2006.01)
代理机构
代理人
詹铭文;萧锡清
主权项
地址
日本
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