PURGE GAS UNIT AND PURGE GAS SUPPLY INTEGRATED UNIT

摘要

A purge gas unit and a purge gas supply integrated unit are provided to decrease a foot space by eliminating unnecessary spaces such as a piping space or an installing space. An input block(4) has a purge flow channel(11) and an input channel. The purge flow channel passes through the input block. The input channel is branched from the purge flow channel. The input block inputs purge gas. An output block(6) outputs the purge gas. A communicating block is installed on the input block and the output block. The communicating block communicates with the input block and the output block. Connecting members(51,52) connect the input block to an input block of another purge gas unit(1) so that the purge flow channel is contacted to the purge flow channel of the another purge gas unit.