摘要 |
The invention relates to a pressure sensor with a carrier ( 2 ), which in an inner region comprises a membrane ( 4 ) on which at least one first measurement element (R<SUB>1-</SUB>) for detecting a pressure impingement of the membrane ( 4 ) is arranged, wherein additionally at least one second measurement element (R<SUB>3-</SUB>) for detecting a pressure impingement of the membrane ( 4 ) is arranged on the membrane, wherein the first measurement element (R<SUB>1-</SUB>) and the second measurement element (R<SUB>3-</SUB>) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R<SUB>1-</SUB>, R<SUB>3-</SUB>) are evaluated together in a manner such that the two measurement elements (R<SUB>1-</SUB>, R<SUB>3-</SUB>) detect a differential pressure acting on the membrane ( 4 ), and thereby compensate the influence of the system pressure acting on both sides of the membrane ( 4 ).
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