发明名称 Piezoelectric microphone
摘要 Provided is a piezoelectric microphone. The piezoelectric microphone includes a plurality of cells each having a lower electrode, a piezoelectric layer, and an upper electrode. The cells can be arranged on a protection layer in various patterns. Since the piezoelectric microphone includes the plurality of cells, the voltage level of a piezoelectric signal of the piezoelectric microphone can be easily increased to a desired level by adjusting the number of the cells. Thus, the sensitivity of the piezoelectric microphone can be increased.
申请公布号 US2008019545(A1) 申请公布日期 2008.01.24
申请号 US20070826332 申请日期 2007.07.13
申请人 MEMS SOLUTION INC. 发明人 JHUNG JAEMYOUNG
分类号 H04R25/00 主分类号 H04R25/00
代理机构 代理人
主权项
地址