| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase sterilizing effects in a treatment chamber for carrying in and out equipment. <P>SOLUTION: A sterilization system circuit (50) is equipped with a sterilizing gas supply main flow passage (52) for distributing a sterilizing gas and for supplying to each treatment chamber (2a, 2b, 2c). Furthermore, the sterilization system circuit (50) is equipped with a fourth sterilizing gas supply passage (68) for supplying the sterilizing gas only to the first treatment chamber (2a) at a large flow volume and a circulating flow passage (95) for a pass box (PB) for returning a part of the sterilizing gas supplied to the first treatment chamber (2a) to the fourth sterilizing gas supply passage (68). Since the sterilizing gas is supplied to and discharged from the first treatment chamber (2a) at a large flow volume, the sterilizing gas spreads over the details of the equipment. <P>COPYRIGHT: (C)2008,JPO&INPIT |
