METHOD OF INSPECTING ULTRASONIC TRANSDUCER FOR ULTRASONIC MICROSCOPE, AND MANUFACTURING METHOD AND INSPECTION DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method of inspecting an ultrasonic transducer for an ultrasonic microscope, capable of surely inspecting quality of the ultrasonic transducer used for the ultrasonic microscope. SOLUTION: The inspection device 1 includes a microscope body 3, an objective revolver 4, an X-Y stage 5, and a personal computer 6. An objective lens 12 and an ultrasonic probe 13 are screwedly attached to the objective revolver 4. An optical image data of a reference plate 7 is acquired using the objective lens 12, an ultrasonic image data of the reference plate 7 is acquired using the ultrasonic transducer 14 of the ultrasonic probe 13, a beam spot shape in a focal point area of an ultrasonic wave S0emitted from the ultrasonic transducer 14 is found based on the optical image data and the ultrasonic image data, and the quality of a tip part shape in the ultrasonic transducer 14 is determined based on a distortion degree of the beam spot shape. COPYRIGHT: (C)2008,JPO&INPIT