Device for liquid treatment of wafer-shaped articles,申请号KR20010065596-传众专利搜索

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发明名称	Device for liquid treatment of wafer-shaped articles
摘要
申请公布号	KR100796709(B1)	申请公布日期	2008.01.21
申请号	KR20010065596	申请日期	2001.10.24
申请人		发明人
分类号	H01L21/304;H01L21/683;H01L21/00;H01L21/306;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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