SEMICONDUCTOR DEVICE FOR RADIATION DETECTION

摘要

The invention provides a semiconductor device (11) for radiation detection in a semiconductor substrate (1) comprising a detection region (3), which detects charge carriers that are generated upon incidence of radiation (X, L) on the semiconductor device (11). The semiconductor device further (11) comprises a further detection region (13), which detects charge carriers that are generated upon incidence of radiation (X) on the semiconductor device (11). A shield (8, 18) extends over the further detection region (13), which prevents electromagnetic radiation (L) from entering the detection region (13). This way the invention provides a semiconductor device (11) for radiation detection in which the separation between the detection of electromagnetic radiation (L) and the detection of other radiation is improved. The invention further provides a detector (10) comprising the semiconductor device (11), and a processor (P) coupled to the detection region (3) and the further detection region (13) for generating an output signal (22) representing the electromagnetic radiation (L).