发明名称 EVAPORATOR AND EVAPORATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an evaporator which can be used for a long time without suffering from clogging and can stably feed a raw material into a reaction section. SOLUTION: The evaporator is equipped with a dispersion section 8 having a gas passage 2 formed inside the main body 1 of the dispersion section 8, a gas inlet 4 which introduces a pressurized carrier gas 3 into the gas passage 2, a means 6 for feeding a raw material solution 5 into the carrier gas passing through the gas passage 2, a gas outlet 7 for sending the carrier gas in which the dispersed raw material solution 5 is dispersed to an evaporation section 22, and a means 18 for cooling the inside of the gas passage 2; and radiation-preventing section 102 having an evaporation tube 20 connected between the reaction section of the apparatus and the gas outlet 7 of the dispersion section 8, a heater 21 that heats the evaporation tube 20 and the evaporation section 22 for heating and evaporating the carrier gas in which the raw material solution is dispersed, and pores 101 formed on the outside of the gas outlet 7. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008001994(A) 申请公布日期 2008.01.10
申请号 JP20070211175 申请日期 2007.08.13
申请人 WATANABE SHOKO:KK;TSUDA MASAYUKI 发明人 TSUDA MASAYUKI;KUSUHARA MASAKI;UMEDA MASARU;FUKAGAWA MITSURU
分类号 C23C16/448;H01L21/31 主分类号 C23C16/448
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