| 摘要 |
PROBLEM TO BE SOLVED: To provide a long-lived yttrium-based ceramic covering material which has an yttrium-based ceramic film excellent in corrosion resistance against a corrosive fluid, in plasma resistance, and in adhesiveness, and to provide its production method. SOLUTION: The yttrium-based ceramic covering material is produced by forming a DLC film 14 by a CVD method on the surface of a base material 12 consisting of silica glass; forming a first yttrium-based ceramic film 16 by forming an yttrium-based ceramic film precursor on the surface of the DLC film 14 and heat-treating the precursor; and forming a second yttrium-based ceramic film 18 by a CVD method on the surface of the first yttrium-based ceramic film 16. COPYRIGHT: (C)2008,JPO&INPIT
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