| 摘要 |
A carrier for moving a cassette and a control method thereof are provided to prevent particles from being generated by interruption of a guide block of the cassette and to mount the cassette on an exact position quickly and securely. A carrier for moving a cassette comprises an upper plate(100) including plural space holes(130), a guide block passing through the space hole so as to move a cassette mounted on the upper plate, and a moving unit moving the guide block.
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