SURFACE INSPECTING APPARATUS AND SURFACE INSPECTING METHOD

摘要

Provided are a surface inspecting apparatus and a surface inspecting method for detecting scratches and defects on a flat surface and a curved surface at a high speed and a high accuracy. In a surface inspecting apparatus (100), a movable mirror (30) and fixed mirrors (40a, 40b, 40c) are arranged in a projector system, and scanning light is reflected to the fixed mirrors (40a, 40b, 40c) by the movable mirror (30), and reflection light from the fixed mirrors (40a, 40b, 40c) is applied from different angles on the inspecting surface of a subject (11) to be inspected. A light receiving system is provided with a light receiving means (8) which can detect the position of the peak point of the reflection light and the distribution value (light quantity distribution) of a waveform. When the light receiving means receives any of the light reflected by the surface to be inspected and the position of the peak point of the reflection light and the distribution value of the waveform are detected, the reflection angle of the light can be measured by the position of the peak point of the reflection light, and whether there is a scratch on the surface to be inspected can be judged by distribution value of the waveform.