发明名称 POLISHING COMPOSITION AND POLISHING METHOD
摘要 A polishing composition contains abrasive grain such as colloidal silica, acid such as citric acid and orthophosphoric acid, an oxidizing agent such as hydrogen peroxide, a compound selected from a group consisting of azoles and its derivatives such as benzotriazole. The polishing composition is suitably used for polishing a magnetic disk substrate.
申请公布号 US2008003928(A1) 申请公布日期 2008.01.03
申请号 US20070855665 申请日期 2007.09.14
申请人 MATSUNAMI YASUSHI;HIRANO JUNICHI;LIN JIE 发明人 MATSUNAMI YASUSHI;HIRANO JUNICHI;LIN JIE
分类号 B24B7/00 主分类号 B24B7/00
代理机构 代理人
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