| 摘要 |
An evacuation damper for semiconductor manufacture process is provided to enhance efficiency of a manufacturing process by adjusting displacement and exhaust pressure. A setting bracket member(30) includes a penetrating hole, an arc guiding long hole(33), a central protruding part(34), and a surface part(35) having a differential height portion(30a). A rotary shaft(21) penetrates the penetrating hole of the setting bracket member. A plurality of setting holes(32a,32e) and the arc guiding long hole are arranged opposite to each other. An adjusting handle member includes a rectangular hole(41), a setting protrusion(42) coupled with the setting holes, a guide shaft hole(43) corresponding to the arc guiding holes, and a handle part(44) contacting the central protruding part. An elastic member(50) and a washer member(51) are installed at the rotary shaft in order to press the adjusting handle member. An elastic adjusting nut member(52) is coupled with a screw part(23). A bolt member(60) penetrates the arc guiding long hole and the guide shaft hole. A spring(62) and a washer member(63) are installed at a screw part(61). The bolt member is coupled with a nut member(64).
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