| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink-jet recorder provided with an ink jet head as a printing means, including a piezoelectric material thin film element, having proper piezoelectric characteristic, even if various internal stresses exist when a thin film is formed, and to provide a thin-film actuator that uses the same element, and the ink jet head. SOLUTION: The piezoelectric material thin-film element is provided with a piezoelectric material layer 14, formed of an oxide including Pb having the perovskite-type crystal structure and electrode layers 13, 15, respectively formed on the layer surfaces in both thickness directions of the piezoelectric material layer 14. In this piezoelectric material thin-film element, the piezoelectric material thin film layer 14 is formed to have a first value of residual distortion larger than the predetermined value in accordance with the direction of application of voltage, and a second value thereof smaller than the predetermined value. Linearity between application voltage and displacement can be ensured, by using any one of the values of two kinds of different residual distortions. The piezoelectric material layer does not always require polarizing processing, and the piezoelectric characteristics becomes less likely to be affected externally. COPYRIGHT: (C)2008,JPO&INPIT
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