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发明名称
Verfahren zur Herstellung einer Struktur mit nanometrischen Oberflächenaufrauhungen
摘要
申请公布号
DE60128165(T2)
申请公布日期
2007.12.27
申请号
DE20016028165T
申请日期
2001.01.03
申请人
SAMSUNG SDI CO. LTD.
发明人
CHA, SEUNG-NAM;LEE, HANG-WOO;CHOI, JUN-HEE
分类号
B81C1/00;C23F4/00;H01J9/02;H01L29/66
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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