| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage device using MEMS technology, power consumption of which is smaller than that of conventional examples, in which the area of electric wiring is reduced, and whose size is reduced. SOLUTION: The storage device of the present invention has: a cantilever beam whose one end is fixed on a supporting substrate so as to be parallel to the surface of the supporting substrate and a sharp projection is provided to the surface near the other end which is not fixed, thus forming an electrostatic type actuator; a reflection mirror provided to the surface of the cantilever beam; and a recording film provided facing the projection of the cantilever. Data are written by pressing the surface of the film against the projection and dents are formed on the surface, and the data are read in such a way that the surface of the recording film is pressed against the projection, the angle of the reflection mirror is not changed when the tip of the beam enters the dents, and the cantilever beam is deformed when the tip does not enter the dents, and when incident read light is reflected, the angle of the reflection mirror is changed, and reading is performed depending on presence/no presence of reflection of the read light at a predetermined angle. COPYRIGHT: (C)2008,JPO&INPIT
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