LASER IRRADIATION APPARATUS, LASER SCRIBING METHOD, METHOD OF MANUFACTURING ELECTROPTIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser irradiation apparatus capable of scribing a work with high productivity, and a laser scribing method and a method of manufacturing an electroptic device each using the laser irradiation apparatus.

SOLUTION: The laser irradiation apparatus 100 is equipped with: a laser beam source 101 for emitting laser beams; a condensing mechanism 103 having a plurality of condenser lenses; a servo motor 104 as a driving section for driving the condensing mechanism 103 so that any one of the plurality of condenser lenses is arranged on the optical axis 101a of the laser beams; a Z-axis slide mechanism 104c as a first moving mechanism capable of moving the condensing mechanism 103 in the direction of the optical axis 101a so that the condensing point of laser beams is located inside a substrate W as an object; an X-axis slide section 108 and a Y-axis slide section 106 as second moving mechanisms which can relatively move a stage 105 on which the substrate W is placed in a plane substantially orthogonal to the optical axis 101a of laser beams; and a main computer 120 as a control section for controlling each constitution.

COPYRIGHT: (C)2008,JPO&INPIT