| 摘要 |
Polishing tools and associated methods are disclosed. In one aspect, a tool for polishing a work piece is provided. Such a tool may include a solid substrate with a greater than 10 wt % graphite having a high degree of graphitization. The solid substrate may have a working surface which has asperities having a tip-to-tip RA value of less than or equal to about 10 mum, and the working surface may have a surface roughness RA value of less than or equal to about 50 mum. A method for making such a tool and a method for polishing a work piece are also presented.
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