| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To propose a laser oscillation device that suppresses deformation of a mirror support member due to thermal deformation of a laser oscillator. <P>SOLUTION: The laser oscillation device is provided with the laser oscillator that has a casing and generates laser light inside the casing, a first mirror that guides the laser light generated by the laser oscillator, and a second mirror that is arranged in parallel to the first mirror so as to further guide the laser light reflected from the first mirror. The first/second mirrors are mounted together onto a common mirror support member. The mirror support member is mechanically coupled to the casing of the laser oscillator merely by three fixing members respectively located at each vertex of a triangle. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
