| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a liquid crystal display element whose light transmittance is enhanced especially in a blue color band, for example, a 430 to 460 nm wavelength range. <P>SOLUTION: In the manufacturing method of the liquid crystal display element 50 having a semiconductor substrate 1, a transparent substrate 10 opposite to the semiconductor substrate and a liquid crystal 20 interposed in a gap d1 between the semiconductor substrate and the transparent substrate, a transparent film 11 composed of aluminum oxide is formed on an opposed surface A side opposite to the semiconductor substrate of the transparent substrate and a transparent electrode 13 composed of an ITO is formed on the transparent film. A film-deposition gas used when the transparent film is formed is specified to be the mixed gas of an oxygen gas and an argon gas and a flow rate of the oxygen gas in the mixed gas is specified to be in a range of 0.01 to 1.12%. <P>COPYRIGHT: (C)2008,JPO&INPIT |
