发明名称 JOINING METHOD OF FLEXIBLE SUBSTRATE AND GLASS SUBSTRATE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a joining method which can reduce a cycle time of a device and highly precisely mount a flexible substrate on a glass substrate. <P>SOLUTION: A flexible substrate is sucked and held to a suction member of an ultrasonic horn, a glass substrate is sucked and held to a substrate holder, and an alignment mark provided to the flexible substrate and an alignment mark provided to the glass substrate are subjected to image recognition by a recognition means. After a gold plating electrode of the flexible substrate and a gold plating electrode of the glass substrate are aligned and superposed, the gold plating electrodes are subjected to metallic joining by ultrasonic oscillation. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2007317932(A) 申请公布日期 2007.12.06
申请号 JP20060146715 申请日期 2006.05.26
申请人 TORAY ENG CO LTD 发明人 IMAI KOICHI;UENISHI TAKASHI
分类号 H01L21/60;H05K3/36 主分类号 H01L21/60
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