| 摘要 |
A developing apparatus is capable of moving a stage for supporting a substance to be developed from a detachable position to a developing area below a developing unit, and two-dimensional movement. The present developing apparatus includes a developing device, a first moving device movable in a direction of axis of ordinate and a second moving device movable in a direction of axis of abscissa, and a stage posture control device to control an inclined posture of the stage in order to hold a relative distance between the developing device and a developing area surface of the substance placed on the stage constant.
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