MEMS BASED MULTIPLE RESONANCES TYPE ULTRASONIC TRANSDUCER FOR RANGING MEASUREMENT WITH HIGH DIRECTIONALITY USING PARAMETRIC TRANSMITTING ARRAY IN AIR

摘要

A MEMS(Micro Electro Mechanical System) based multiple resonance ultrasonic transducer is provided to enhance a spatial resolution of a robot by improving a directionality of the robot. A MEMS based multiple resonance ultrasonic transducer includes an ultrasonic actuator(110) and an ultrasonic sensor(120). The ultrasonic actuator includes first and second unit actuators(112a,112b), which form a parametric transmitting array in air by generating two ultrasonic waves at high voltages. The first and second unit actuators have resonance frequencies at two different ultrasonic frequencies, such that a high directional differential pulse is generated. The ultrasonic sensor includes unit sensors(122), which have resonance frequencies at a frequency of the differential pulse, such that an ultrasonic pulse signal reflected from an obstacle is detected.