| 摘要 |
PROBLEM TO BE SOLVED: To realize an air filter unit capable of reducing the effect on a sample caused by flow-in of a gas containing particles generated near an air filter frame into a sample rack when temperature varies. SOLUTION: This air filter unit 18 is provided with: a filter part 30 composed of a filter medium 30b filtering gas passing through the air filter unit 18 and the filter frame 30a holding the filter medium 30b at an outer periphery part thereof; and a duct part 31 for separately running the gas having passed through an outer periphery region of the filter medium 30b from the gas having passed through an inner side of the outer periphery region. COPYRIGHT: (C)2008,JPO&INPIT
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