Micro-mirror `s Eigen frequency compensating method for e.g. digital light projector, involves causing excitation of micro-mirror by forces of external magnetic field and coil, and compensating Eigen frequency by applying additional force

摘要

The method involves causing excitation of a micro-mirror (10) through a force of an external magnetic field (12) and a force of a coil (14), where the coil is attached to a micro-mechanical structure (16). An Eigen frequency of the mirror is compensated by applying an additional compensation force. The compensation force is produced by a current in the coil, and a compensating current is determined in a signal processing unit (20). A rotational factor correlated with a rotation angle of the mirror is used for determining the compensating current. An independent claim is also included for a device for compensating an Eigen frequency of a micro-mirror, comprising a signal processing unit.