| 摘要 |
An inspection apparatus and an inspection method are provided to reduce an occupied space and to be transformed to a dual loader type inspection device and to enhance the inspection efficiency by connecting to a single loader type auto transfer line, without extending a foot-print of the single loader type. A probe room performs a test for an object. A loader room(11) is located along the side of the probe room. A cassette for storing the plural objects is mounted, two load ports(13A,13B) are located by separating each other, and a transfer instrument(14) is installed between the load ports and the probe room to transfer the objects within the loader room. Each load ports are located respectively along the transferring path of an auto transfer apparatus of the cassette.
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