| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat-treatment facility and a method therefor, wherein the invasion of the outer air introduced into a temperature-raising chamber accompanying the carry-in of a material to be treated, into a main treating chamber can be reduced or shut out in a simple facility structure without using an expensive non-oxidizing gas. SOLUTION: The heat-treatment apparatus is provided with a temperature-raising chamber 52 which is sectioned with a freely opened/closed door, the main treating chamber 54, a temperature-lowering chamber 56 and a cooling chamber 58, wherein the temperature-raising chamber 52 is provided with a second gas discharge port 14' having a first opening/closing valve 12' in addition to the conventional first gas discharge port 66 for exhausting excessive atmospheric gas, and the cooling chamber 58 is provided with a gas discharge port 18' provided with a second opening/closing valve 16' for opening/closing the valve only the time when the outer air is taken into the temperature-raising chamber. Further, the inner pressure P2 in the main treating chamber is kept higher than the inner pressure P1 in the temperature-raising chamber and the inner pressure P3 in the cooling chamber. COPYRIGHT: (C)2008,JPO&INPIT
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