| 摘要 |
An organic material depositing apparatus is provided to minimize the generation of particles during transfer of a substrate and improve deposition uniformity of organic materials at the same time. An organic material depositing apparatus includes a holder(240) on which a substrate(S) is seated, and a first transfer unit(20) and a second transfer unit which are linked with the holder and pivoted to the holder, and which transfers the substrate horizontally and allows organic materials to be deposited onto the substrate. The first and second transfer units each comprises a first speed reduction member(222), second speed reduction members(232a,232b) and a third speed reduction member(234), connecting members(250) for linking the first to third speed reduction members with one another, a drive part(210) linked with the speed reduction members and driven at a uniform speed reduction ratio, and a first joint arm(220) and a second joint arm(230) that are rotated by rotational power of the first to third speed reduction members.
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