| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing a substrate in which position information on a position of a process area on the substrate is retrieved with respect to an alignment mark to separate alignment and actual processing. SOLUTION: A substrate 5 can efficiently be manufactured by separating the alignment and the actual processing when an alignment mark 6a fixed with respect to the substrate 5 is provided, and when position information on a position of a process area on the substrate 5 is retrieved with respect to the alignment mark 6a before the substrate 5 is processed. In that case, alignment can be performed by redetermining the position of the alignment mark 6a only once, and by using the stored position information on the position of the process area during the processing. COPYRIGHT: (C)2008,JPO&INPIT |
