PARTICLE RADIATION DEVICE COMPRISING A PARTICLE SOURCE THAT IS OPERATED IN AN ULTRAHIGH VACUUM AND A CASCADE PUMP ASSEMBLY FOR A PARTICLE RADIATION DEVICE OF THIS TYPE,申请号EP20010956509-传众专利搜索

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发明名称	PARTICLE RADIATION DEVICE COMPRISING A PARTICLE SOURCE THAT IS OPERATED IN AN ULTRAHIGH VACUUM AND A CASCADE PUMP ASSEMBLY FOR A PARTICLE RADIATION DEVICE OF THIS TYPE
摘要
申请公布号	EP1299898(B1)	申请公布日期	2007.11.14
申请号	EP20010956509	申请日期	2001.07.03
申请人	CARL ZEISS NTS GMBH	发明人	GNAUCK, PETER;DREXEL, VOLKER
分类号	H01J37/28;F04D19/04;F04D25/00;H01J37/18	主分类号	H01J37/28
代理机构		代理人
主权项
地址

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