ASHING PROCESS FACILITY AND METHOD

摘要

An ashing process equipment and method is provided to shorten a time required to carry out a process of preheating and cooling a substrate by heating and cooling the substrate in a load lock chamber. A load port(12) loads and unloads a cassette receiving plural substrates. An EFEM(Equipment Front End Module)(20) is disposed adjacently to the load port and has a substrate transferring device(22a) transferring the substrate to the load port. A load lock chamber(100) is disposed adjacently to the EFEM, and an ashing process is performed in at least one process chamber(32). A transfer chamber(24) transfers the substrate between the load lock chamber and the process chamber. The load lock chamber has a temperature control member(200) for heating and cooling the substrate.