| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cooling device which can obtain high cooling efficiency and keep an even temperature distribution in the plane of a substrate during cooling. SOLUTION: The steam of a coolant is compressed into superheated steam by a compressor 20 and then is cooled and condensed by a capacitor 30, so that a supercooled liquid of the coolant is obtained. The supercooled liquid is expanded and decompressed by passing through an expansion valve 40, so that a mixed phase of the saturated liquid and saturated steam of the coolant is obtained. Next, the mixed fluid is separated into a vapor phase and a liquid phase by a liquid separator 50, and only the saturated liquid of the coolant is supplied to a cold plate 10. The hollow portion of the cold plate 10 is filled only with the saturated liquid of the coolant. It is thus possible to obtain high cooling efficiency sufficiently using boiling heat transfer and keep an even temperature distribution in the plane of the plate because the saturated liquid does not have a pressure difference. COPYRIGHT: (C)2008,JPO&INPIT
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