发明名称 GALLIUM NITRIDE COMPOUND SEMICONDUCTOR LIGHT EMITTING DEVICE, METHOD FOR MANUFACTURING THE SAME, AND LAMP
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for gallium nitride compound semiconductor light emitting device assuring low drive voltage (Vf) and high light extracting efficiency, and also to provide the same gallium nitride compound semiconductor light emitting device and a lamp. <P>SOLUTION: In the method for manufacturing a gallium nitride compound semiconductor light emitting device, a light transmitting conductive oxide film 15 including a dopant is laminated on a p-type semiconductor layer of the gallium nitride compound semiconductor device 1. The method includes a step of laser annealing to conduct the annealing process to the light transmitting conductive oxide film 15 using the laser, after lamination of the light transmitting conductive oxide film 15. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007294578(A) 申请公布日期 2007.11.08
申请号 JP20060119207 申请日期 2006.04.24
申请人 SHOWA DENKO KK 发明人 FUKUNAGA NAGAHIRO;OSAWA HIROSHI
分类号 C23C14/08;H01L33/22;H01L33/32;H01L33/42 主分类号 C23C14/08
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