| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for grinding the surface of a non-circular shaped substrate with excellent flatness. SOLUTION: In the grinding method for the substrate, the grinding wheel is contacted with the surface of the substrate while rotating the substrate 3 and the grinding wheel 2. The non-circular shaped substrate 3 is used as the substrate, a dummy material 4 is disposed on the peripheral edge part of the non-circular shaped substrate, and the dummy material is disposed so that the grinding wheel always maintains a constant contact area with a surface formed by the non-circular shaped substrate and the dummy material. COPYRIGHT: (C)2008,JPO&INPIT |
