| 摘要 |
PROBLEM TO BE SOLVED: To provide an aerosol generating apparatus, a method for generating aerosol and a film forming apparatus each of which is capable of generating an aerosol in a stable manner. SOLUTION: The formation of a fluidized bed M' at the inside of an aerosol generator 10 makes it possible to prevent the particulate material M from aggregating and solidifying and to obtain uniform particle size distribution in a direction of height of the fluidized bed. In addition, the aerosol generator 10 is provided with an optical sensor 30 which measures the position of the top layer M's of the fluidized bed M', and an adjusting unit 31 adjusts the edge position of an aerosol delivery tube with respect to the top layer M's of the fluidized bed M' based on the position data of the top layer measured by the optical sensor 30, thereby suppressing the fluctuation in aerosol concentration due to the change in suction height at which the aerosol is sucked from the top layer M's of the fluidized bed to the aerosol delivery tube 21. Furthermore, by the tracing operation for moving one end of the aerosol delivery tube 21 horizontally across (along) the top layer M's of the fluidized bed M', it is possible to avoid harmful effect that the particle size distribution becomes locally non-uniform. COPYRIGHT: (C)2008,JPO&INPIT
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