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经营范围
发明名称
METHOD OF PRODUCING SILICON EPITAXIAL WAFERS
摘要
申请公布号
KR100774070(B1)
申请公布日期
2007.11.06
申请号
KR20017016624
申请日期
2001.12.26
申请人
发明人
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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