| 摘要 |
A touch mode electrostatic capacity pressure sensor is provided to sense a change of pressure by checking a change of electrostatic capacity. A touch mode electrostatic capacity pressure sensor(100) comprises followings. A conductive lower electrode(20) sharing an uniform area is formed on a substrate(10). A dielectric layer(30) is formed on the substrate to cover the lower electrode. A ring type supporter(41) is located on the substrate to surround the lower electrode. An upper electrode(40) is supported by the supporter, shields an upper space of the lower electrode surrounded by the supporter, and comprises a conductive electrode portion which is formed to be contacted with the dielectric layer by transforming elastically according to the increasing pressure applied from the upper part. Electrostatic capacity of the lower electrode and the upper electrode are changed depending on the area contacted with the dielectric layer of the electrode portion. |
