| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device in which an accurate sample image can be obtained over the front face of a sample even if the unevenness of the sample is large. SOLUTION: In the charged particle beam device which obtains the sample image after three-dimensionally scanning the sample and detecting two-dimensional particles from the sample by a detector, the device is provided with a focus pattern memory 13 in which focus positions in the Z direction at respective scanning positions have been described, and focus fine adjusting coils 6 which are arranged adjacent to objective lenses 3 and which fine-adjust focuses in the Z direction of the sample. The device two-dimensionally scans using scanning coils 5, and constituted so as to carry out three-dimensional scanning while fine-adjusting the positions in the Z direction by the focus fine adjusting coils 6 based on data stored in the focus pattern memory 13 according to scanning positions on the sample 2. COPYRIGHT: (C)2008,JPO&INPIT
|
