| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum-added zinc oxide (AZO) transparent conductive film containing metallic nano particles capable of improving conductivity of a thin film without deteriorating light transmissivity, and its manufacturing method. SOLUTION: This is the AZO transparent conductive film containing metallic nano particles and its manufacturing method. In the manufacturing method of the transparent conductive film, firstly, a metal precursor is added in an alcohol containing reaction liquid of aluminum-added zinc oxide formed by a sol-gel method, and a sol-gel of the aluminum-added zinc oxide is formed by reduction action of alcohol and at the same time, metallic nano particles are formed, and AZO gel solution containing metal nano particles is formed, and then, after coating and film-forming, appropriate heat treatment is carried out. The light transmissivity of the whole visible light range of this AZO transparent conductive film containing the metal nano particles reaches 85% or more and resistivity is 2×10<SP>-3</SP>Ωcm or less. COPYRIGHT: (C)2008,JPO&INPIT
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