发明名称 Gespritzter Yttriumoxid-Aluminiumoxidverbundfilm
摘要 <p>An object of the invention is to provide a film of an yttria-alumina complex oxide having a high peel strength of the film to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 mu m and not larger than 100 mu m, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 mu m and not larger than 100 mu m. Preferably, the yttria-alumina complex oxide contains at least garnet phase, and may further contain perovskite phase.</p>
申请公布号 DE60222341(D1) 申请公布日期 2007.10.25
申请号 DE2002622341 申请日期 2002.07.16
申请人 NGK INSULATORS LTD. 发明人 YAMADA, HIROTAKE;OHASHI, TSUNEAKI
分类号 C01F17/00;C23C4/10;C23C4/18;H01L21/205 主分类号 C01F17/00
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