发明名称 |
Gespritzter Yttriumoxid-Aluminiumoxidverbundfilm |
摘要 |
<p>An object of the invention is to provide a film of an yttria-alumina complex oxide having a high peel strength of the film to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 mu m and not larger than 100 mu m, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 mu m and not larger than 100 mu m. Preferably, the yttria-alumina complex oxide contains at least garnet phase, and may further contain perovskite phase.</p> |
申请公布号 |
DE60222341(D1) |
申请公布日期 |
2007.10.25 |
申请号 |
DE2002622341 |
申请日期 |
2002.07.16 |
申请人 |
NGK INSULATORS LTD. |
发明人 |
YAMADA, HIROTAKE;OHASHI, TSUNEAKI |
分类号 |
C01F17/00;C23C4/10;C23C4/18;H01L21/205 |
主分类号 |
C01F17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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