发明名称 |
Method for fabricating a fluid ejection device |
摘要 |
A method of fabricating a fluid ejection device comprises providing a barrier layer which defines fluidic spaces. The fluidic spaces defined by the barrier layer are filled with filler. A throughway is etched through the substrate. The filler is removed from the fluidic spaces after etching the throughway.
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申请公布号 |
US7285226(B2) |
申请公布日期 |
2007.10.23 |
申请号 |
US20040976580 |
申请日期 |
2004.10.29 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
BENGALI SADIQ |
分类号 |
G11B5/127 |
主分类号 |
G11B5/127 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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