| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sputtering target with reduced generation of abnormal discharge for formation of a protective film for an optical recording medium which performs recording, reproducing, recording and reproducing, and further erasing of information by laser light. <P>SOLUTION: The method for manufacturing the sputtering target for forming the protective film of the optical recording medium is characterized by hot pressing a powder mixture obtained by compounding and mixing the powder mixture so as to contain 10 to 30 mol% conductive zinc oxide powder or zinc oxide powder, 1 to 15 mol% gallium oxide powder, 1 to 15 mol% indium oxide powder, and 1 to 5 mol% silicon dioxide powder having hydrophobicity on the surface and the balance zinc sulfide powder. <P>COPYRIGHT: (C)2008,JPO&INPIT |
